- Three independently adjustableTrueFocusion sources
- Planar sample sizes up to 50 mm diameter by 25 mm height
- 可控波束diameter over a wide range of operating energies (100 eV to 10 keV)
- 液氮冷却样品阶段（可选）
- Vacuum/inert gas/cryogenic transfer system protects environmentally sensitive samples (optional)
- Remote operation
高级样品准备
188bet体育国际Fischione.Instruments’ Model 1062 TrionMill is an excellent tool for creating the sample surface characteristics needed for SEM imaging and analyses.
TrionMill的三个离子源提供大规模铣削平面和横截面样本。高能量操作允许快速铣削大面积（高达50毫米）;低能量操作允许温和样品抛光。
Accepts large sample sizes
The TrionMill creates the largest and most uniform flat area achievable by ion milling. The instrument accepts the following sample sizes:
- Planar:高达50毫米直径x 25 mm高度[1.968 x 0.787英寸]
- 横截面：Maximum: 10 x 10 x 4 mm [0.39 x 0.39 x 0.157 in.]
Cross-section station (optional)
The Fischione Instruments’ Cross-section station is a tool for creating pristine cross-section samples ready for ion milling in the SEM Mill. Learn more about theCross-section station.
Quick sample transfer
The front-loading load lock with pneumatic vacuum gate valve enables high sample throughput. The bayonet sample holder’s quick release functionality speeds sample transfer.
精确角度调整
The ion sources are tilted to provide the desired milling angle. The continuously adjustable ion source tilt angles range from 0 to +10°. You may choose to use one, two, or three of the TrueFocus ion sources. Each ion source beam angle moves in unison.
自动铣削角度调整
使用触摸屏自动铣削角度调整使您可以创建多步研磨序列，包括在整个铣削过程中自动调节铣削角度。
Programmable sample motion
Sample rotation is 360° continuous rotation with variable rotation speed and a sample rocking feature. Automatic height detection establishes the milling plane, which yields repeatable results.
Integrated stage cooling (optional)
The TrionMill’s liquid nitrogen system features a dewar located within the enclosure that is fully integrated and interlocked. The dewar is positioned near the operator for easy access. Temperature is continuously displayed on the touch screen. The stage cooling functionality provides up to 18 hours of cryo conditions.
Programmable temperature
The TrionMill offers the ability to program and maintain a specific temperature between ambient and cryogenic.
在低温温度结束时，在通风之前，阶段温度自动增加到环境温度，以避免样品霜冻和污染。如果杜瓦尔中的液氮变耗，则可以将热保护器编程为特定阶段温度阈值，其中如果液氮中的液氮耗尽，则将离子源失活。
Vacuum/inert gas/cryogenic transfer system (optional)
This system allows for the direct transfer of a sample at vacuum, in inert gas, or at a cryogenic temperature to SEM or FIB. The transfer system is a collaboration with Quorum Technologies Ltd.
Sample viewing (optional)
The ion milling process can be monitored in situ in the milling position when using either of the optional high-magnification microscopes.
- High-magnification (525X) microscope
- High-magnification (1,960X) microscope
The viewing window is protected by a shutter, which prevents buildup of sputtered material that can interfere with sample observation.
Sample image acquisition (optional)
The sample image acquisition option employs a CMOS (complementary metal oxide semiconductor) camera and monitor to view samples and capture images in situ during milling. This system is useful for monitoring the delayering process.
Automatic termination
The ion milling process can be automatically terminated by elapsed time or by temperature.
Remote diagnostics
188bet体育国际Fischione.Instruments is committed to support maximum instrument uptime. To that end, the TrionMill has the capability of remote diagnostics. When connected to the Internet, the TrionMill can be accessed by Fischione Instruments Service for rapid troubleshooting and diagnostics support.
